Growth is fueled by the rising adoption of ultra-high purity gases in advanced semiconductor fabrication, including 3nm and 2nm nodes, where fluorinated gases, silane, and hydrogen chloride are critical for etching, deposition, and cleaning. The proliferation of electric vehicles (EVs) and expansion of 5G networks further drive demand for specialty gases such as argon and hexafluoroethane.
Chicago, Feb. 11, 2026 (GLOBE NEWSWIRE) — The global semiconductor manufacturing equipment market was valued at 10.22 billion in 2024 and is expected to reach US$ 17.86 billion by 2033, growing at a CAGR of 6.4% from 2025 to 2033.
The semiconductor gases market is surging globally, driven by the rapid expansion of advanced semiconductor manufacturing technologies. Semiconductor gases, such as nitrogen trifluoride (NF3), silane (SiH4), and hydrogen chloride (HCl), are critical in processes like etching, deposition, and cleaning. The market is reflecting the increasing adoption of high-purity gases in cutting-edge chip fabrication. Notably, nitrogen trifluoride is widely used for cleaning chemical vapor deposition chambers, while silane is essential for thin-film deposition in memory and logic chips. The United States and South Korea are leading consumers of these gases, with South Korea’s semiconductor industry heavily reliant on NF3 for its advanced memory chip production. Additionally, Japan and Taiwan are key developers of high-purity gases, with companies like Air Products and Linde dominating the supply chain.
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Fluorinated and Specialty Gases Critical for EUV Lithography and Next-Gen Chip Fabrication
The primary driver behind the semiconductor gases market growth is the proliferation of advanced semiconductor nodes, such as 3nm and 2nm chips, which require ultra-high purity gases to ensure defect-free manufacturing. For instance, Taiwan Semiconductor Manufacturing Company (TSMC) has ramped up its use of fluorinated gases for extreme ultraviolet (EUV) lithography, a critical process for sub-5nm chips. Furthermore, the rise of electric vehicles (EVs) and 5G infrastructure has significantly increased the demand for specialty gases like hexafluoroethane (C2F6) and argon, which are used in etching and plasma processes. In 2024, the EV sector alone accounted for a substantial portion of the demand for semiconductor gases, particularly in China, where EV production is at an all-time high. Wherein, semiconductor gases are primarily deployed in fabrication facilities (fabs) for processes like etching, deposition, and cleaning. These gases are also critical for storage and transportation, requiring specialized cryogenic systems to maintain purity. Recent developments in the semiconductor gases market include the introduction of on-site bulk gas supply systems by companies like Linde, which enhance efficiency and reduce costs for fabs. The United States, Taiwan, and South Korea remain the largest consumers, while Japan and Germany are leading providers of high-purity gases. The market is poised for further growth as demand for advanced chips continues to rise globally.
Semiconductor Gas Demand Surges with Expansion of 3nm/2nm Chip Production
The proliferation of advanced semiconductor nodes, such as 3nm and 2nm chips, is a key driver of the semiconductor gases market. These cutting-edge chips demand ultra-high purity gases to ensure defect-free manufacturing and optimal performance. For instance, TSMC and Samsung, leaders in advanced chip production, have significantly increased their use of fluorinated gases like nitrogen trifluoride (NF3) and hexafluoroethane (C2F6) for EUV lithography and plasma etching. In 2024, TSMC alone consumed more than 1,000 metric tons of NF3 for its 3nm production lines, highlighting the critical role of these gases in advanced manufacturing. Similarly, Samsung’s 2nm development has driven demand for silane (SiH4) and hydrogen chloride (HCl), which are essential for thin-film deposition and cleaning procedures.
The demand for these gases in the semiconductor gases market is further fueled by the growing adoption of AI and machine learning applications, which require high-performance chips. For example, NVIDIA’s GPUs, widely used in AI applications, rely on advanced semiconductor nodes that necessitate ultra-high purity gases during fabrication. Additionally, the automotive sector’s shift toward electric vehicles (EVs) has increased the demand for specialty gases like argon and fluorinated compounds, which are used in power semiconductor manufacturing. In 2024, the EV sector accounted for over 500 metric tons of argon consumption globally, with China leading the charge in EV production. This trend underscores the critical role of advanced semiconductor nodes in driving the demand for high-purity gases.
Specialty Gases Fuel Advanced Logic and 3D Packaging Technologies in Semiconductor Production
Electronic specialty gases, including chlorine, ammonia, silicon compounds, and others, command the lion’s share of the semiconductor gases market, contributing around 65% of total consumption. This dominance arises from their essential roles in doping, etching, and deposition processes that form the foundation of integrated circuit manufacturing In 2024, advanced logic nodes require ultra-precise doping steps that rely heavily on ammonia-based feedstocks refined to 99.9999% purity, ensuring minimal defect rates in transistor channels Leading foundries have reported that specialized silicon precursors can enhance film deposition uniformity by up to 40% compared to older gas mixtures, driving improved device yields and performance. Next-generation packaging technologies, such as 3D stacking, have amplified the use of chlorine compounds to streamline metal etch steps, where up to 18 etch cycles can occur per device layer. The push toward even smaller geometries in logic and memory has further accelerated demand for high-purity spatial gases, underscoring the indispensability of these materials across the industry.
Asia-Pacific Front-End Fabs Fuel Unprecedented Demand for Specialty Semiconductor Gases
Asia Pacific dominates the global semiconductor gas consumption landscape due to a network of foundries, integrated device manufacturers, and facilities across Taiwan, South Korea, China, and Japan. As of 2024, these countries collectively operate more than 85 front-end fabrication plants that rely on volumes of gases for etch, deposition, and operations. The region’s robust supply chain is further amplified by dedicated local suppliers who can deliver specialized gases on short notice. According to industry surveys, advanced logic foundries in Taiwan alone have scaled to nearly 15 million wafer starts per quarter, driving significant demand for fluorides and silicon precursors. South Korean memory manufacturers have expanded their footprints with at least five new 3D NAND production lines since 2023, each requiring continuous flows of nitrogen trifluoride, silane, and ammonia to achieve multi-layer stacking and precise doping. Parallel to this, Chinese semiconductor enterprises continue to ramp up 300 mm fab projects, reportedly adding over 6 new plants in just 18 months. Such strategic expansions underscore the region’s unparalleled appetite for specialized semiconductor gases, solidifying Asia Pacific as the epicenter of leading-edge chip production.
Semiconductor Gases Market Major Players:
- Air Liquide S.A.
- Air Products Inc
- American Gas Products (AGP)
- Linde Group
- Gruppo SIAD
- Indiana Oxygen Inc.
- Iwatani Corporation
- Sumitomo Seika Chemicals Company, Ltd.
- Messer Group
- Mitsui Chemicals, Inc.
- REC Silicon ASA
- Solvay SA
- Other Prominent Players
Key Market Segmentation:
By Type:
- Bulk Gases
- Nitrogen
- Oxygen
- Argon
- Helium
- Hydrogen
- Carbon-di-oxide
- Electronic Special Gases (ESGs)
- Chlorine
- Ammonia
- Silicon
- Others
By Process:
- Chamber Cleaning
- Oxidation
- Deposition
- Etching
- Doping
- Others
By Application:
- Semiconductor Type
- PCBs
- Displays
- Solar (PV)
- LED
- Others
By Region
- North America
- Europe
- Asia Pacific
- Middle East and Africa
- South America
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